Topic No. 5 MODELING THE ENHANCEMENT OF NANOIMPRINT STAMP BENDING COMPLIANCE BY BACKSIDE GROOVES: MITIGATING THE IMPACT OF WAFER NANOTOPOGRAPHY ON RESIDUAL LAYER THICKNESS
نویسنده
چکیده
We describe a model for the compliance of a nanoimprint stamp with a grid of backside grooves, as proposed by Nielsen et al. [1]. We integrate the model with a fast simulation technique that we have previously demonstrated [2], to show how etched stamp-flexures reduce systematic, pattern-dependent residual layer thickness (RLT) variations while attenuating the contribution of random wafer nanotopography to RLT variation.
منابع مشابه
Towards nanoimprint lithography-aware layout design checking
Just as the simulation of photolithography has enabled resolution-enhancement through Optical Proximity Correction, the physical simulation of nanoimprint lithography is needed to guide the design of products that will use this process. We present an extremely fast method for simulating thermal nanoimprint lithography. The technique encapsulates the resist’s mechanical behavior using an analyti...
متن کاملModeling and controlling topographical nonuniformity in thermoplastic micro- and nano-embossing
The embossing of thermoplastic polymeric plates is valuable for manufacturing microand nanofluidic devices and diffractive optics. Meanwhile, the imprinting of sub-micrometer-thickness thermoplastic layers has emerged as a lithographic technique with exceptional resolution. Yet neither hot micro-embossing nor thermal nanoimprint lithography will be fully adopted without efficient numerical tech...
متن کاملElectrostatic force-assisted nanoimprint lithography (EFAN).
We present and demonstrate a novel imprint method, electrostatic force-assisted nanoimprint lithography (EFAN), where a voltage applied between a mold and a substrate generates an electrostatic force that presses the mold into a resist on the substrate. We have successfully used EFAN to pattern nanostructures in a photocurable resist spin-coated on a wafer, with high fidelity and excellent unif...
متن کاملExact 3-D Solution for Free Bending Vibration of Thick FG Plates and Homogeneous Plate Coated by a Single FG Layer on Elastic Foundations
This paper presents new exact 3-D (three-dimensional) elasticity closed-form solutions for out-of-plane free vibration of thick rectangular single layered FG (functionally graded) plates and thick rectangular homogeneous plate coated by a functionally graded layer with simply supported boundary conditions. It is assumed that the plate is on a Winkler-Pasternak elastic foundation and elasticity ...
متن کامل9. Nanoimprint Lithography – Patterning of Resists Using Molding
Nanoimprint lithography (NIL) is an emerging high-resolution parallel patterning method, mainly aimed towards fields in which electronbeam and high-end photolithography are costly and do not provide sufficient resolution at reasonable throughput. In a top-down approach, a surface pattern of a stamp is replicated into a material by mechanical contact and threedimensional material displacement. T...
متن کامل